Modeling and simulation of SiC CVD in the horizontal hot-wall reactor concept

2004/05/29 by Jérôme Mezière, J. Meziere, M. Ucar +4 · 6 citations
Chemistry · Engineering · Materials Science · #Catalytic Processes in Materials Science #Chemical vapor deposition #Chemistry #Composite material #Deposition (geology) #Doping #Epitaxy #Etching (microfabrication) #Geology #Hydrogen #Layer (electronics) #Mass transfer #Materials science #Nanotechnology #Nitrogen #Optoelectronics #Plasma Diagnostics and Applications #Silicon #Silicon Carbide Semiconductor Technologies #Silicon carbide

paper · doi:10.1016/j.jcrysgro.2004.04.038

openalex publication_date 2004/05/29 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/22

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