Selective area growth of β-Ga2O3 by HCl-based halide vapor phase epitaxy

2023/11/28 by Takayoshi Oshima, Yuichi Oshima
#Ga2O3 #selective area growth

paper · doi:10.48505/nims.4266

Abstract

Applied Physics Express. 15 [7] (2022)75503-75503

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