Phase-controlled epitaxial lateral overgrowth of α-Ga2O3 by halide vapor phase epitaxy

2024/01/22 by Yuichi Oshima, Katsuaki Kawara, Takayoshi Oshima +2
#ELO #HVPE #α-Ga2O3

paper · doi:10.48505/nims.4359

Abstract

JAPANESE JOURNAL OF APPLIED PHYSICS. 59 [2] (2020)

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