2008/09/05 by О. И. Величко, O. I. Velichko, Velichko, O. I. +2
Chemical Engineering · Engineering · Materials Science · Physics and Astronomy · #FOS: Physical sciences #Materials Science (cond-mat.mtrl-sci) #Molten salt chemistry and electrochemical processes #Nuclear Materials and Properties #Silicon and Solar Cell Technologies #cond-mat.mtrl-sci
paper · pdf · doi:10.48550/arxiv.0809.1113
30 pages, 5 figures, in Russian
arxiv created 2008/09/05 · openalex publication_date 2008/09/05 · arxiv updated 2009/12/01 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/28
On the basis of the Green function method, analytical solutions of the diffusion equation which describes nonstationary migration of nonequilibrium interstitial impurity atoms have been derived. It is supposed that the initial distribution of nonequilibrium impurity interstitials is formed due to ion implantation and, therefore, is described by the Gaussian function. The condition of the constant concentration of impurity interstitials (the Dirichlet boundary condition) or reflecting boundary condition was imposed on the surface of a semiconductor. The Dirichlet boundary condition was also enforced for the concentration of impurity interstitials in the infinity, i.e., in the bulk of a semiconductor. On the basis of the solutions derived the redistribution of ion-implanted boron in silicon substrate during low-temperature thermal treatment has been simulated. The calculated profile of boron atoms after annealing agrees well with experimental data. It means that the analytical solutions derived can be used both for verifying the numerical results and for modeling the long-range migration of nonequilibrium impurity interstitials during low-temperature thermal treatments.