2008/05/02 by Konstantin Iakoubovskii, Kazutaka Mitsuishi, Yoshiko Nakayama +1 · 3 citations
Materials Science · Engineering · Chemistry · Mathematics · #Electron and X-Ray Spectroscopy Techniques #Advancements in Battery Materials #Semiconductor materials and devices #Electron energy loss spectroscopy #Spectroscopy #Mean free path #Range (aeronautics) #Inelastic mean free path #Electron #Excitation #Scaling #Atomic physics #Lambda #Calibration #Electron scattering #Chemistry #Physics #Scattering #Molecular physics #Optics #Materials science #Nuclear physics #Mathematics
paper · doi:10.1002/jemt.20597
openalex publication_date 2008/05/02 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/25
Measurements of thickness using electron energy loss spectroscopy (EELS) are revised. Absolute thickness values can be quickly and accurately determined with the Kramers-Kronig sum method. The EELS data analysis is even much easier with the log-ratio method, however, absolute calibration of this method requires knowledge of the mean free path of inelastic electron scattering lambda. The latter has been measured here in a wide range of solids and a scaling law lambda approximately rho(-0.3) versus mass density rho has been revealed. EELS measurements critically depend on the excitation and collection angles. This dependence has been studied experimentally and theoretically and an efficient model has been formulated.