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Fundamentals of electron energy-loss spectroscopy

2016/02/09 by Ferdinand Hofer, Franz Schmidt, Werner Grogger +1 · 1 citation
Biochemistry, Genetics and Molecular Biology · Materials Science · Chemistry · #Advanced Electron Microscopy Techniques and Applications #Electron and X-Ray Spectroscopy Techniques #Anodic Oxide Films and Nanostructures #Electron energy loss spectroscopy #Scanning transmission electron microscopy #Energy filtered transmission electron microscopy #Spectroscopy #Plasmon #Transmission electron microscopy #Electron tomography #Materials science #Elemental analysis #Electron #Electron spectroscopy #Inelastic scattering #Resolution (logic) #High-resolution transmission electron microscopy #Electron microscope #Energy-dispersive X-ray spectroscopy #Instrumental chemistry #Scattering #Scanning electron microscope #Optics #Nanotechnology #Physics #Chemistry #Optoelectronics #Time-resolved spectroscopy #Computer science #Nuclear physics

paper · doi:10.1088/1757-899x/109/1/012007

openalex publication_date 2016/02/09 · openalex created_date 2025/10/10 · openalex updated_date 2026/08/04

Abstract

Electron energy-loss spectroscopy (EELS) is an analytical technique that is based on inelastic scattering of fast electrons in a thin specimen. In a transmission electron microscope (TEM) it can provide structural and chemical information about a specimen, even down to atomic resolution. This review provides an overview of the physical basis and new developments and applications of EELS in scanning transmission electron microscopy. Recent advances in elemental mapping, spectrum imaging of plasmonic structures and quantitative analysis of atomically resolved elemental maps are highlighted.

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