2018/12/17 by Liang-Chia Chen, Chen, Liang-Chia, Pei-Ju Tan +14
Computer Science · Engineering · Physics and Astronomy · #Advanced Optical Sensing Technologies #Applied Physics (physics.app-ph) #FOS: Physical sciences #Image Processing Techniques and Applications #Optical measurement and interference techniques #Optics (physics.optics) #physics.app-ph #physics.optics
paper · pdf · doi:10.48550/arxiv.1812.06573
Conflict of interest between co-authors
openalex publication_date 2018/12/17 · openalex created_date 2018/12/22 · arxiv created 2019/04/11 · arxiv updated 2019/04/24 · openalex updated_date 2026/07/28
A full-field chromatic confocal microscopy using a multispectral sensor was developed for quasi-one-shot microscopic 3D surface measurement. An innovative optical configuration employs a digital micromirror device (DMD) and a multispectral sensor is used to realize chromatic confocal microscopy with full-field area scanning. In the optical design, an area-scan type chromatic dispersive objective is specially designed to achieve measuring specification. Based on an 8x chromatic dispersive objective, the FOV for one shot measurement can be reached to 1.8mm*1.3mm which is immersive to microscopic profilometry. The spectral image captured by the multispectral sensor at each pinhole position has a unique spectrum pattern corresponding to its conjugate measured depth. A normalized cross-correlation (NCC) algorithm is developed to establish a spectrum-depth response curve with its corresponding spectrum pattern sets for accurate reconstruction of the tested 3D surface profile. With real test on standard targets, the measurement repeatability for a single surface depth is less than 0.6 micrometer.