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Quasi one-shot full-field surface profilometry using digital diffractive-confocal imaging correlation microscope

2018/12/16 by Duc Trung Nguyen, Liang-Chia Chen, Nguyen, Duc Trung +4
Biochemistry, Genetics and Molecular Biology · Computer Science · Engineering · Physics and Astronomy · #Advanced Fluorescence Microscopy Techniques #Applied Physics (physics.app-ph) #FOS: Physical sciences #Optical measurement and interference techniques #Optics (physics.optics) #Photoacoustic and Ultrasonic Imaging #physics.app-ph #physics.optics

paper · pdf · doi:10.48550/arxiv.1812.06582

Conflict of interest between authors

openalex publication_date 2018/12/17 · openalex created_date 2018/12/22 · arxiv created 2019/04/11 · arxiv updated 2019/04/24 · openalex updated_date 2026/07/28

Abstract

One-shot full-field surface profilometry using digital diffractive-confocal imaging correlation microscope based on digital micromirror device is developed for one-shot microscopic 3D surface measurement. Optical configuration applies confocal microscope setup and was building on DMD to generate specific pinhole array arrangement for minimizing cross talk effect. An innovative method was invented to create normalized cross correlation depth response curve from diffraction patterns of the pinhole. Using this approach, the sub-micrometer scale depth can be detected with high accuracy and precision.

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