2018/12/17 by Duc Trung Nguyen, Nguyen, Duc Trung, Liang-Chia Chen +1
Physics and Astronomy · #Applied Physics (physics.app-ph) #FOS: Physical sciences #Optics (physics.optics) #physics.app-ph #physics.optics
paper · pdf · doi:10.48550/arxiv.1812.06578
Conflict of interest between co-authors
arxiv created 2019/04/11 · arxiv updated 2019/04/24
A novel full-field surface profilometer using diffractive-based chromatic confocal microscopy and area-scan spectral sensing is developed. A normalized cross correlation algorithm was developed to establish a spectrum-depth response curve. A measuring repeatability for a single surface depth can be controlled within 120 nanometers.