2018/08/24 by Ha-Duong Ngo, O. Ehrmann, Oswin Ehrmann +4 · 1 citation
Engineering · Physics and Astronomy · #Advanced MEMS and NEMS Technologies #Aerospace #Aerospace engineering #Automotive industry #Composite material #Electrical engineering #Electronics #Engineering #Engineering physics #Materials science #Mechanical and Optical Resonators #Mechanical engineering #Microelectromechanical systems #Nanotechnology #Nanowire Synthesis and Applications #Optoelectronics #Piezoresistive effect #Semiconductor #Silicon #Silicon carbide #Silicon on insulator
paper · doi:10.1007/978-3-319-99540-3_12
openalex publication_date 2018/08/24 · crossref created 2018/08/24 · crossref issued 2018/08/25 · crossref published 2018/08/25 · crossref published-online 2018/08/25 · crossref published-print 2019/01/01 · crossref deposited 2025/07/06 · openalex created_date 2025/10/10 · crossref indexed 2026/06/03 · openalex updated_date 2026/08/04