A graphical representation of the piezoresistance coefficients in silicon

1982/01/01 by Y. Kanda, Yozo Kanda · 19 citations
Engineering · Physics and Astronomy · #Advanced MEMS and NEMS Technologies #Mechanical and Optical Resonators #Acoustic Wave Resonator Technologies

paper · doi:10.1109/t-ed.1982.20659

Abstract

The longitudinal and transverse piezoresistance coefficients, Π(300 K), at room temperature are plotted as a function of the crystal directions for orientations in the

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