2000/08/07 by B. Kahng, Hawoong Jeong, H. Jeong +2 · 1 citation
Engineering · Materials Science · Physics and Astronomy · #Diamond and Carbon-based Materials Research #Integrated Circuits and Semiconductor Failure Analysis #Ion-surface interactions and analysis #cond-mat
paper · pdf · doi:10.1063/1.1343468
arxiv created 2000/08/07 · openalex publication_date 2001/02/05 · arxiv updated 2009/11/30 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/28
Recently, it was experimentally demonstrated that sputtering under normal incidence leads to the formation of spatially ordered uniform nanoscale islands or holes. Here, we show that these nanostructures have inherently nonlinear origin, first appearing when the nonlinear terms start to dominate the surface dynamics. Depending on the sign of the nonlinear terms, determined by the shape of the collision cascade, the surface can develop regular islands or holes with identical dynamical features, and while the size of these nanostructures is independent of flux and temperature, it can be modified by tuning the ion energy.