2006/11/14 by Emmanuel O. Yewande, Reiner Kree, Alexander K. Hartmann
Engineering · Materials Science · Physics and Astronomy · #Electron and X-Ray Spectroscopy Techniques #Integrated Circuits and Semiconductor Failure Analysis #Ion-surface interactions and analysis #cond-mat.mtrl-sci #cond-mat.stat-mech
paper · pdf · doi:10.1103/physrevb.75.155325
published as Phys. Rev. B 75, 155325 (2007) · 9 pages, 14 figures
arxiv created 2006/11/14 · openalex publication_date 2007/04/19 · arxiv updated 2009/12/01 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/28
We implement substrate rotation in a 2+1-dimensional solid-on-solid model of ion-beam sputtering of solid surfaces. With this extension of the model, we study the effect of concurrent rotation, as the surface is sputtered, on possible topographic regions of surface patterns. In particular, we perform a detailed numerical analysis of the time evolution of dots obtained from our Monte Carlo simulations at off-normal-incidence sputter erosion. We found the same power-law scaling exponents of the dot characteristics for two different sets of ion-material combinations, without and with substrate rotation.