1974/02/01 by Z. H. Cho, M. Singh, Mahesh Chand Singh +1 · 1 citation
Engineering · Materials Science · Physics and Astronomy · #Electron and X-Ray Spectroscopy Techniques #Ion-surface interactions and analysis #X-ray Spectroscopy and Fluorescence Analysis
paper · doi:10.1109/tns.1974.4327523
crossref issued 1974/02/01 · crossref published 1974/02/01 · crossref published-print 1974/02/01 · openalex publication_date 1974/02/01 · crossref created 2008/07/22 · crossref deposited 2021/11/29 · openalex created_date 2025/10/10 · crossref indexed 2026/07/28 · openalex updated_date 2026/07/29
An effort has been made to construct a heavy-ion scanning microprobe. Some preliminary results on beam-optics are presented, and a new technique for measuring the beam spot size is reported here. The performance of ion beams as a source for characteristic x-ray production has been studied. As a justification of this work, a brief comparison is made between the x-ray excitation probabilities of protons and heavy ions on the one hand, and that of electrons and x-rays on the other. The present work is a first step toward the future construction of a high resolution ion microprobe which would have a beam size smaller than 1 μm.