Thermal scanning probe lithography for fabrication of perforated metallic films

2025/10/14 by Paloma E. S. Pellegrini, Pellegrini, Paloma E S, Francisco T. Orlandini +9
Engineering · Physics and Astronomy · #Advanced Measurement and Metrology Techniques #Advancements in Photolithography Techniques #FOS: Physical sciences #Force Microscopy Techniques and Applications #Optics (physics.optics)

paper · pdf · doi:10.48550/arxiv.2510.12234

openalex publication_date 2025/10/14 · openalex created_date 2025/10/17 · openalex updated_date 2026/08/01

Abstract

Thermal scanning probe lithography offers high resolution and versatility, making it a promising alternative for fabricating photonic devices. Here, we introduce a new method that expands its applications by enabling direct fabrication of arbitrary perforated patterns on a silver film.

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