3D-Printed Optics for Wafer-Scale Probing

2018/01/01 by Mareike Trappen, Trappen, Mareike, Matthias Blaicher +13
Engineering · Physics and Astronomy · #Applied Physics (physics.app-ph) #FOS: Physical sciences #Nanofabrication and Lithography Techniques #Photonic Crystals and Applications #Photonic and Optical Devices

paper · doi:10.48550/arxiv.1808.10834

openalex publication_date 2018/01/01 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/29

Abstract

Mass production of photonic integrated circuits requires high-throughput wafer-level testing. We demonstrate that optical probes equipped with 3D-printed elements allow for efficient coupling of light to etched facets of nanophotonic waveguides. The technique is widely applicable to different integration platforms.

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