Frank Greer

1. Isotropic atomic layer etching of MgO-doped lithium niobate using sequential exposures of H₂ and SF₆ plasmas
   2023/10/16 by Ivy I. Chen, Chen, Ivy I., Jennifer Solgaard +16 · 2 citations
   Engineering · #Advanced Fiber Optic Sensors #FOS: Physical sciences #Materials Science (cond-mat.mtrl-sci) #Mesoscale and Nanoscale Physics (cond-mat.mes-hall) #Optics (physics.optics) #Photonic and Optical Devices #Semiconductor Lasers and Optical Devices
2. Plasma-enhanced atomic layer deposition of titanium nitride for superconducting devices
   2023/12/15 by John Femi‐Oyetoro, Femi-Oyetoro, John, Sasha Sypkens +11 · 1 citation
   Engineering · Materials Science · #Metal and Thin Film Mechanics #Semiconductor materials and devices #Copper Interconnects and Reliability
3. Toward Total Automation of Microfluidics for Extraterrestial In Situ Analysis
   2011/10/05 by María F. Mora, Frank Greer, Amanda M. Stockton +2 · 2 citations
   Engineering · #Microfluidic and Capillary Electrophoresis Applications #Innovative Microfluidic and Catalytic Techniques Innovation #Microfluidic and Bio-sensing Technologies