Femi-Oyetoro, John

1. Plasma-enhanced atomic layer deposition of titanium nitride for superconducting devices
   2023/12/15 by John Femi‐Oyetoro, Femi-Oyetoro, John, Sasha Sypkens +11 · 1 citation
   Engineering · Materials Science · #Metal and Thin Film Mechanics #Semiconductor materials and devices #Copper Interconnects and Reliability