Zoltán Donkó
- Customized ion flux-energy distribution functions in capacitively coupled plasmas by voltage waveform tailoring
2016/02/08 by Edmund Schuengel, Zoltán Donkó, Schuengel, E. +9 · 2 citations
Chemistry · Engineering · #Electrohydrodynamics and Fluid Dynamics #FOS: Physical sciences #Mass Spectrometry Techniques and Applications #Plasma Diagnostics and Applications #Plasma Physics (physics.plasm-ph)
- Frequency-dependent electron power absorption mode transitions in capacitively coupled argon-oxygen plasmas
2023/07/19 by Aranka Derzsi, Derzsi, Aranka, Máté Vass +9 · 1 citation
Engineering · #FOS: Physical sciences #Gas Sensing Nanomaterials and Sensors #Plasma Diagnostics and Applications #Plasma Physics (physics.plasm-ph) #Semiconductor materials and devices