Schuengel, E.

1. Customized ion flux-energy distribution functions in capacitively coupled plasmas by voltage waveform tailoring
   2016/02/08 by Edmund Schuengel, Zoltán Donkó, Schuengel, E. +9 · 2 citations
   Chemistry · Engineering · #Electrohydrodynamics and Fluid Dynamics #FOS: Physical sciences #Mass Spectrometry Techniques and Applications #Plasma Diagnostics and Applications #Plasma Physics (physics.plasm-ph)