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Vijay M. Shinde

  1. 3D Modeling and optimization of SiC deposition from CH3SiCl3/H2 in a commercial hot wall reactor
    2020/11/05 by Balamurugan Deivendran, Vijay M. Shinde, V. M. Shinde +2 · 3 citations
    Engineering · #Silicon Carbide Semiconductor Technologies #Semiconductor materials and devices #High-Temperature Coating Behaviors