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K. Kuhl

  1. A square-diaphragm piezoresistive pressure sensor with a rectangular central boss for low-pressure ranges
    1993/10/01 by H. Sandmaier, K. Kuhl, K. Kühl · 7 citations
    Engineering · Physics and Astronomy · #Advanced MEMS and NEMS Technologies #Mechanical and Optical Resonators #Acoustic Wave Resonator Technologies