A square-diaphragm piezoresistive pressure sensor with a rectangular central boss for low-pressure ranges

1993/10/01 by H. Sandmaier, K. Kuhl, K. Kühl · 7 citations
Engineering · Physics and Astronomy · #Advanced MEMS and NEMS Technologies #Mechanical and Optical Resonators #Acoustic Wave Resonator Technologies

paper · doi:10.1109/16.277331

Abstract

Describes the theory and experimental data for a piezoresistive low-pressure sensor featuring a variety of advantages. The objective of this development was a sensor with high sensitivity, high overload range, and good linearity. In comparison to familiar sensor types, the sensor developed for the pressure range of 10 kPa exhibits an excellent sensitivity of 35 mV/V FSO (full scale output) and nonlinearity <+or-0.05%. The sensor's theoretical performance was confirmed by measurements on manufactured pressure sensors.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>

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• Application and Optimization of Stiffness Abruption Structures for Pressure Sensors with High Sensitivity and Anti-Overload Ability. [europepmc]
• Design Optimization and Fabrication of a Novel Structural SOI Piezoresistive Pressure Sensor with High Accuracy. [europepmc]
• Mechanical Structural Design of a Piezoresistive Pressure Sensor for Low-Pressure Measurement: A Computational Analysis by Increases in the Sensor Sensitivity. [europepmc]
• A Piezoresistive Pressure Sensor with Optimized Positions and Thickness of Piezoresistors. [europepmc]
• Structural Engineering in Piezoresistive Micropressure Sensors: A Focused Review. [europepmc]
• A novel evolutionary method for parameter-free MEMS structural design and its application in piezoresistive pressure sensors. [europepmc]
• Design and fabrication of a LEG based stretchable piezoresistive acoustic pressure sensor for ultra low pressures. [europepmc]

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