Hei Wong

1. XPS study on the effects of thermal annealing on CeO2/La2O3 stacked gate dielectrics
   2016/01/05 by Jieqiong Zhang, Hei Wong, Kuniyuki Kakushima +1 · 1 citation
   Chemistry · Engineering · Materials Science · Physics and Astronomy · #Analytical Chemistry (journal) #Annealing (glass) #Chemical engineering #Chemistry #Composite material #Copper Interconnects and Reliability #Dielectric #Electrical engineering #Equivalent oxide thickness #Gate dielectric #Gate oxide #High-κ dielectric #Materials science #Metallurgy #Nanotechnology #Optoelectronics #Oxide #Semiconductor materials and devices #Semiconductor materials and interfaces #Thermal #Thermodynamics #X-ray photoelectron spectroscopy