2016/01/05 by Jieqiong Zhang, Hei Wong, Kuniyuki Kakushima +1 · 1 citation
Chemistry · Engineering · Materials Science · Physics and Astronomy · #Analytical Chemistry (journal) #Annealing (glass) #Chemical engineering #Chemistry #Composite material #Copper Interconnects and Reliability #Dielectric #Electrical engineering #Equivalent oxide thickness #Gate dielectric #Gate oxide #High-κ dielectric #Materials science #Metallurgy #Nanotechnology #Optoelectronics #Oxide #Semiconductor materials and devices #Semiconductor materials and interfaces #Thermal #Thermodynamics #X-ray photoelectron spectroscopy
paper · doi:10.1016/j.tsf.2016.01.001
openalex publication_date 2016/01/05 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/28