T. Nyberg
- Fundamental understanding and modeling of reactive sputtering processes
2005/01/09 by S. Berg, T. Nyberg, Tomas Nyberg · 704 citations
Chemistry · Engineering · Materials Science · #Characterization (materials science) #Chemistry #Computer science #Copper Interconnects and Reliability #Deposition (geology) #Engineering #Materials science #Metal and Thin Film Mechanics #Nanotechnology #Physical chemistry #Process (computing) #Process control #Process engineering #Semiconductor materials and devices #Sputtering #Stoichiometry #Thin film