- Optimizing CMOS-compatible, superconducting titanium nitride resonators: Deposition conditions and structuring processes
2026/02/28 by Simon J. K. Lang, S. J. K. Lang, Alexandra Schewski +23 · 1 citation
Engineering · #Acoustic Wave Resonator Technologies #Dielectric #Fabrication #Metal and Thin Film Mechanics #Nitride #Photonic and Optical Devices #Resist #Resonator #Sputtering #Thin film #Tin #Titanium #Titanium nitride