- Nanoimprint Lithography for Honeycomb Texturing of Multicrystalline Silicon
2011/01/01 by Hubert Hauser, Bernhard Michl, Volker Kübler +4 · 1 citation
Engineering · #Nanofabrication and Lithography Techniques #Advanced Surface Polishing Techniques #Advancements in Photolithography Techniques #Materials science #Nanoimprint lithography #Nanomanufacturing #Silicon #Wafer #Monocrystalline silicon #Optoelectronics #Substrate (aquarium) #Etching (microfabrication) #Fabrication #Nanotechnology