A comparative study on reactive and non-reactive unbalanced magnetron sputter deposition of TiN coatings

2002/08/01 by P.H. Mayrhofer, P.H Mayrhofer, Filip Kunc +5 · 2 citations
Engineering · Materials Science · Physics and Astronomy · #Metal and Thin Film Mechanics #Diamond and Carbon-based Materials Research #GaN-based semiconductor devices and materials

paper · doi:10.1016/s0040-6090(02)00511-4

Citations

• Use of the Voigt function in a single-line method for the analysis of X-ray diffraction line broadening

Cited by

• Conductive nitrides: Growth principles, optical and electronic properties, and their perspectives in photonics and plasmonics
• Microstructural design of hard coatings