2011/09/28 by Florent Seichepine, Sven Salomon, Seichepine, Florent +13
Engineering · Physics and Astronomy · #Advanced MEMS and NEMS Technologies #Electrowetting and Microfluidic Technologies #FOS: Physical sciences #Materials Science (cond-mat.mtrl-sci) #Mechanical and Optical Resonators #cond-mat.mtrl-sci
paper · pdf · doi:10.48550/arxiv.1109.6268
20 pages, 5 figures
arxiv created 2011/09/28 · openalex publication_date 2011/09/28 · arxiv updated 2011/09/29 · openalex created_date 2022/10/02 · openalex updated_date 2026/07/28
The wafer scale integration of carbon nanotubes (CNT) remains a challenge for electronic and electromechanical applications. We propose a novel CNT integration process relying on the combination of controlled capillary assembly and buried electrode dielectrophoresis (DEP). This process enables to monitor the precise spatial localization of a high density of CNTs and their alignment in a pre-defined direction. Large arrays of independent and low resistivity (4.4 x 10-5 Ω.m) interconnections were achieved using this hybrid assembly with double-walled carbon nanotubes (DWNT). Finally, arrays of suspended individual CNT carpets have been realized and we demonstrate their potential use as functional nano-electromechanical systems (NEMS) by monitoring their resonance frequencies (ranging between 1.7 MHz to 10.5MHz) using a Fabry-Perot interferometer.