High‐resolution, high‐throughput imaging with a multibeam scanning electron microscope

2015/01/27 by A.L. EBERLE, Anna Lena Eberle, S. MIKULA +9 · 10 citations
Materials Science · Biochemistry, Genetics and Molecular Biology · Engineering · #Electron and X-Ray Spectroscopy Techniques #Advanced Electron Microscopy Techniques and Applications #Advancements in Photolithography Techniques

paper · pdf · doi:10.1111/jmi.12224

Abstract

Electron-electron interactions and detector bandwidth limit the maximal imaging speed of single-beam scanning electron microscopes. We use multiple electron beams in a single column and detect secondary electrons in parallel to increase the imaging speed by close to two orders of magnitude and demonstrate imaging for a variety of samples ranging from biological brain tissue to semiconductor wafers.

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