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Compressive multi-beam scanning transmission electron microscopy

2025/11/08 by Yasuhara, Akira, Sannomiya, Takumi, Horisaki, Ryoichi
#FOS: Physical sciences #Instrumentation and Detectors (physics.ins-det) #Optics (physics.optics)

paper · doi:10.48550/arxiv.2511.05864

Abstract

We demonstrate a multi-beam scanning transmission electron microscopy (STEM) imaging that integrates down-sampling with super-resolution image reconstruction via a compressive sensing framework. A custom condenser aperture with six randomly positioned circular holes is employed to produce a multi-beam STEM probe, with beam distribution tuned through defocus. While the raw multi-beam images exhibit overlapping patterns, reconstruction using Adam optimization and total variation normalization yields high-fidelity images that closely reproduce the original sample structures, even from substantially down-sampled data. The proposed approach offers a pathway toward significant acceleration of such techniques through multibeam sparse sampling and computational reconstruction potentially useful for the analytical scanning methods in general.

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