Local thickness and composition measurements from scanning convergent-beam electron diffraction of a binary non-crystalline material obtained by a pixelated detector

2020/05/19 by K. Nakazawa, Katsuaki Nakazawa, K. Mitsuishi +12 · 1 citation
Biochemistry, Genetics and Molecular Biology · Engineering · Materials Science · Physics and Astronomy · #Advanced Electron Microscopy Techniques and Applications #Electron and X-Ray Spectroscopy Techniques #FOS: Physical sciences #Ion-surface interactions and analysis #Materials Science (cond-mat.mtrl-sci) #cond-mat.mtrl-sci

paper · pdf · doi:10.48550/arxiv.2005.09337

15 pages, 10 figures, 6 supporting figures

arxiv created 2020/05/19 · openalex publication_date 2020/05/19 · arxiv updated 2020/05/20 · openalex created_date 2020/05/29 · openalex updated_date 2026/07/28

Abstract

We measured the local composition and thickness of SiO2-based glass material from diffraction. By using four dimensional scanning transmission electron microscopy (4D-STEM), we obtained diffraction at each scanning point. Comparing the obtained diffraction with simulated diffraction patterns, we try to measure the local composition and thickness. Although this method requires some constraints, this method measured local composition and thickness with 1/10 or less electron dose of EELS.

Citations

• Fast Parallel Algorithms for Short-Range Molecular Dynamics

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