2017/12/11 by Samuel M. Parks, Richard R. Grote, David A. Hopper +1 · 12 citations
Chemistry · Earth and Planetary Sciences · Engineering · Materials Science · Physics and Astronomy · #Chemical vapor deposition #Chemistry #Cleave #Composite material #Computer science #Crystal (programming language) #Crystallography #Diamond #Diamond and Carbon-based Materials Research #Fabrication #High-pressure geophysics and materials #Laser #Materials science #Metal and Thin Film Mechanics #Nanotechnology #Optics #Optoelectronics #Single crystal #Synthetic diamond #cond-mat.mtrl-sci
paper · pdf · doi:10.1016/j.diamond.2018.02.013
published in Diamond and Related Materials 84, 20-25 (Elsevier BV) · 11 pages, 10 figures, 2 tables
arxiv created 2017/12/11 · openalex created_date 2017/12/22 · openalex publication_date 2018/02/27 · arxiv updated 2019/07/23 · openalex updated_date 2026/08/05
Single-crystal diamond plates with surfaces oriented in a (111) crystal plane are required for high-performance solid-state device platforms ranging from power electronics to quantum information processing architectures. However, producing plates with this orientation has proven challenging. In this paper, we demonstrate a method for reliably and precisely fabricating (111)-faced plates from commercially available, chemical-vapor-deposition-grown, type-IIa single-crystal diamond substrates with (100) faces. Our method uses a nanosecond-pulsed visible laser to nucleate and propagate a mechanical cleave in a chosen (111) crystal plane, resulting in faces as large as 3.0 mm×0.3 mm with atomically flat surfaces, negligible miscut angles, and near zero kerf loss. We discuss the underlying physical mechanisms of the process along with potential improvements that will enable the production of millimeter-scale (111)-faced single-crystal diamond plates for a variety of emerging devices and applications.