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Evolution of microstructure and phase in amorphous, protocrystalline, and microcrystalline silicon studied by real time spectroscopic ellipsometry

2003/02/05 by R. W. Collins, R.W. Collins, A.S. Ferlauto +10 · 2 citations
Chemistry · Engineering · Materials Science · #Amorphous silicon #Amorphous solid #Analytical Chemistry (journal) #Chemical vapor deposition #Chemistry #Condensed matter physics #Crystalline silicon #Crystallography #Ellipsometry #Materials science #Microcrystalline #Nanotechnology #Optoelectronics #Phase (matter) #Phase transition #Physics #Plasma-enhanced chemical vapor deposition #Silicon #Silicon Nanostructures and Photoluminescence #Silicon and Solar Cell Technologies #Thin film #Thin-Film Transistor Technologies

paper · doi:10.1016/s0927-0248(02)00436-1

openalex publication_date 2003/02/05 · crossref created 2003/02/05 · crossref issued 2003/07/01 · crossref published 2003/07/01 · crossref published-print 2003/07/01 · crossref deposited 2024/01/08 · openalex created_date 2025/10/10 · crossref indexed 2026/06/04 · openalex updated_date 2026/08/01

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