2014/05/14 by Jie Zou, Jie J. Zou, Zou, Jie +11
Engineering · Physics and Astronomy · #Advanced MEMS and NEMS Technologies #FOS: Physical sciences #Force Microscopy Techniques and Applications #Materials Science (cond-mat.mtrl-sci) #Mechanical and Optical Resonators #Mesoscale and Nanoscale Physics (cond-mat.mes-hall) #cond-mat.mes-hall #cond-mat.mtrl-sci
paper · pdf · doi:10.48550/arxiv.1405.3343
17 pages, 6 figures. This manuscript will appear as a chapter in the book "Nanocantilever Beams: Modeling, Fabrication and Applications."
arxiv created 2014/05/14 · openalex publication_date 2014/05/14 · arxiv updated 2014/05/15 · openalex created_date 2017/08/17 · openalex updated_date 2026/07/28
This chapter describes the basic design, simulation, and fabrication for fully Si integrated, waveguide coupled, optomechanical force and displacement sensors. The approach of full Si integration of all stationary nanophotonic components with mechanically separated movable components creates the opportunity to independently engineer these two parts for a variety of MEMS and NEMS sensing applications that require high precision, high bandwidth, and small footprint. Further integration of actuators for static and dynamic actuation is also possible.