2021/10/18 by Daniel Navarro‐Urrios, Martín F. Colombano, Navarro-Urrios, D. +16 · 1 citation
Engineering · Physics and Astronomy · #Advanced MEMS and NEMS Technologies #Applied Physics (physics.app-ph) #FOS: Physical sciences #Mechanical and Optical Resonators #Optics (physics.optics) #Photonic and Optical Devices
paper · pdf · doi:10.48550/arxiv.2110.09178
openalex publication_date 2021/10/18 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/28
Nano-electro-opto-mechanical systems enable the synergistic coexistence of electrical, mechanical, and optical signals on a chip to realize new functions. Most of the technology platforms proposed for the fabrication of these systems so far are not fully compatible with the mainstream CMOS technology, thus hindering mass-scale utilization. We have developed a CMOS technology platform for nano-electro-opto-mechanical systems that includes piezoelectric interdigitated transducers for electronic driving of mechanical signals and nanocrystalline silicon nanobeams for enhanced optomechanical interaction. Room temperature operation of devices at 2 GHz and with peak sensitivity down to 2.6 cavity phonons is demonstrated. Our proof-of-principle technology platform can be integrated and interfaced with silicon photonics, electronics, and MEMS devices and may enable multiple functions for coherent signal processing in the classical and quantum domains.