2014/06/03 by Mohsin Aziz, David Christopher Hudson, Saverio Russo · 1 citation
Chemistry · Engineering · Physics and Astronomy · #Advanced MEMS and NEMS Technologies #Analytical Chemistry (journal) #Annealing (glass) #Chemistry #Condensed matter physics #Fabrication #Materials science #Mechanical and Optical Resonators #Metallurgy #Molybdenum #Nanotechnology #Niobium #Optoelectronics #Physics #Physics of Superconductivity and Magnetism #Rhenium #Superconductivity #cond-mat.supr-con
paper · pdf · doi:10.1063/1.4883115
To appear on Applied Physics Letters
arxiv created 2014/06/03 · openalex publication_date 2014/06/09 · arxiv updated 2015/06/19 · openalex created_date 2025/10/10 · openalex updated_date 2026/08/05
Suspended superconducting nanostructures of MoRe 50%/50% by weight are fabricated employing commonly used fabrication steps in micro- and nano-meter scale devices followed by wet-etching with Hydro-fluoric acid of a SiO2 sacrificial layer. Suspended superconducting channels as narrow as 50 nm and length 3 μm have a critical temperature of ≈6.5 K, which can increase by 0.5 K upon annealing at 400 °C. A detailed study of the dependence of the superconducting critical current and critical temperature upon annealing and in devices with different channel widths reveals that desorption of contaminants is responsible for the improved superconducting properties. These findings pave the way for the development of superconducting electromechanical devices using standard fabrication techniques.