2010/08/09 by P. Spinicelli, A. Dréau, L. Rondin +9 · 1 citation
Physics and Astronomy · #quant-ph #cond-mat.mtrl-sci
paper · pdf · doi:10.1088/1367-2630/13/2/025014
12 pages, 3 figures
arxiv created 2010/08/09 · arxiv updated 2015/05/19
We report a versatile method to engineer arrays of nitrogen-vacancy (NV) color centers in dia- mond at the nanoscale. The defects were produced in parallel by ion implantation through 80 nm diameter apertures patterned using electron beam lithography in a PMMA layer deposited on a diamond surface. The implantation was performed with CN- molecules which increased the NV defect formation yield. This method could enable the realization of a solid-state coupled-spin array and could be used for positioning an optically active NV center on a photonic microstructure.