Resistivity behavior and phase transformations in β-W thin films

1974/03/01 by P. M. Petroff, P.M. Petroff, W. A. Reed +1 · 2 citations
Engineering · Materials Science · #Copper Interconnects and Reliability #Metal and Thin Film Mechanics #Semiconductor materials and devices

paper · doi:10.1016/0040-6090(74)90092-3

crossref issued 1974/03/01 · crossref published 1974/03/01 · crossref published-print 1974/03/01 · openalex publication_date 1974/03/01 · crossref created 2002/10/18 · crossref deposited 2019/04/05 · openalex created_date 2025/10/10 · crossref indexed 2026/04/30 · openalex updated_date 2026/07/29

Citations

• Microstructure, growth, resistivity, and stresses in thin tungsten films deposited by rf sputtering

Cited by

• Magnetron sputter deposition of A-15 and bcc crystal structure tungsten thin films
• Beta-tungsten [wikipedia]