2008/01/03 by David J. Smith · 2 citations
Biochemistry, Genetics and Molecular Biology · Materials Science · Engineering · #Advanced Electron Microscopy Techniques and Applications #Electron and X-Ray Spectroscopy Techniques #Integrated Circuits and Semiconductor Failure Analysis
paper · pdf · doi:10.1017/s1431927608080124
openalex publication_date 2008/01/03 · openalex created_date 2025/10/10 · openalex updated_date 2026/05/22
The successful correction of spherical aberration is an exciting and revolutionary development for the whole field of electron microscopy. Image interpretability can be extended out to sub-Angstrom levels, thereby creating many novel opportunities for materials characterization. Correction of lens aberrations involves either direct (online) hardware attachments in fixed-beam or scanning TEM or indirect (off-line) software processing using either off-axis electron holography or focal-series reconstruction. This review traces some of the important steps along the path to realizing aberration correction, including early attempts with hardware correctors, the development of online microscope control, and methods for accurate measurement of aberrations. Recent developments and some initial applications of aberration-corrected electron microscopy using these different approaches are surveyed. Finally, future prospects and problems are briefly discussed.