3.2-MP Back-Illuminated Polarization Image Sensor With Four-Directional Air-Gap Wire Grid and 2.5-<inline-formula> <tex-math notation="LaTeX">μ </tex-math> </inline-formula>m Pixels

2018/05/04 by Yasushi Maruyama, Takashi Terada, Tomohiro Yamazaki +16 · 104 citations
Computer Science · Engineering · #Air gap (plumbing) #Birefringence #CCD and CMOS Imaging Sensors #Extinction ratio #Image sensor #Materials science #Optical Polarization and Ellipsometry #Optical measurement and interference techniques #Optics #Optoelectronics #Physics #Polarization (electrochemistry) #Polarizer #Transmittance #Wavelength

paper · doi:10.1109/ted.2018.2829190

published in IEEE Transactions on Electron Devices 65(6), 2544-2551 (Institute of Electrical and Electronics Engineers)

openalex publication_date 2018/05/04 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/26

Abstract

A 3.2-MP four-directional polarization image sensor with air-gap wire-grid polarizer is described. The image sensor was fabricated using a wafer process and incorporates back-illumination and an antireflection layer to minimize optical flaring and ghosting problems. In testing, the sensor achieved a polarization transmittance of 63.3% and an extinction ratio of 85 at 550 nm, thereby outperforming conventional polarization sensors. The proposed sensor also exhibited good oblique-incidence characteristics, even with small polarization pixels of 2.5 μm. Based on these results, the proposed image sensor is suitable for various megapixel fusion-imaging applications, such as reducing surface reflections, highly accurate depth mapping, and condition-robust surveillance.

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