2026/01/21 by Jia Xin Cao, Ziyang Zheng, Xu Zhou +3 · 1 voice
Engineering · Medicine · Materials Science · #Laser Material Processing Techniques #Ocular and Laser Science Research #Silicon Nanostructures and Photoluminescence
paper · pdf · doi:10.1088/2631-7990/ae3b83
openalex publication_date 2026/01/21 · openalex created_date 2026/01/24 · openalex updated_date 2026/07/22
Abstract High-performance Si photodetectors featuring an ultrawide spectral range can be realized through femtosecond (fs)-laser modification, enabling their broad application in focal plane arrays (FPAs) for artificial intelligence and complex operational scenarios. However, laser-induced surface inhomogeneity and elevated dark currents reduce the signal-to-noise ratio of FPAs in image detector arrays. To address these challenges, a pulse-shaping technique is employed here to precisely control light–matter interactions during laser modification. This approach not only improves the uniformity of surface microstructures but also significantly suppresses dark currents. The optimized device exhibits high responsivity across the visible to near-infrared spectrum, with a peak responsivity of 164.17 A·W −1 at −2.5 V. Notably, the photodetector demonstrates exceptional weak-light detection capacity at room temperature owing to its record-high specific detectivity of 1.71 × 10 14 Jones, surpassing that of all previously reported Si-based photodetectors. These results highlight substantial advancements in the application of fs-laser-modified Si photodetectors, underscoring their potential in fields such as autonomous driving, weak-light detection, and medical monitoring.