2005/05/05 by P. Morales, M. DiCiano, J. Y. T. Wei
Materials Science · Physics and Astronomy · #Electronic and Structural Properties of Oxides #Ferroelectric and Piezoelectric Materials #Magnetic and transport properties of perovskites and related materials #cond-mat.supr-con
paper · pdf · doi:10.1063/1.1925781
published as P. Morales, M. DiCiano and J.Y.T. Wei, Appl. Phys. Lett. 86, 192509 (2005) · 4 pages, 3 figures. Published Applied Physics Letters
openalex publication_date 2005/05/05 · arxiv created 2005/06/01 · arxiv updated 2009/12/01 · openalex created_date 2016/06/24 · openalex updated_date 2026/07/28
A chemical-free technique for fabricating submicron complex oxide structures has been developed based on selective epitaxial growth. The crystallinity and hence the conductivity of the complex oxide is inhibited by amorphous SrTiO3 (STO). Using a combination of pulsed laser deposition and electron-beam lithography, amorphous STO barriers are first deposited on a single-crystal substrate. A thin film is then deposited on the patterned substrate with the amorphous STO barriers acting to electrically and physically isolate different regions of the film. Since no chemical or physical etchants come in contact with the deposited film, its integrity and stability are preserved. This technique has produced submicron YBa2Cu3O7−δ and La2∕3Ca1∕3MnO3 structures.