Nanometric cutting: Mechanisms, practices and future perspectives

2022/05/27 by Fengzhou Fang, Min Lai, Jinshi Wang +3 · 1 citation
Engineering · Materials Science · #Advanced Surface Polishing Techniques #Diamond and Carbon-based Materials Research #Integrated Circuits and Semiconductor Failure Analysis

paper · doi:10.1016/j.ijmachtools.2022.103905

openalex publication_date 2022/05/27 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/29

Citations

• Enhancement of the machinability of silicon by hydrogen ion implantation for ultra-precision micro-cutting
• Ductile‐Regime Machining of Germanium and Silicon
• Diamond cutting of micro-structure array on brittle material assisted by multi-ion implantation
• A strong basis for friction as the origin of size effect in cutting of metals

Cited by

• Cutting mechanism of reaction-bonded silicon carbide in laser-assisted ultra-precision machining