Enhancement of the machinability of silicon by hydrogen ion implantation for ultra-precision micro-cutting

2013/07/27 by S. To, Suet To, H. Wang +3 · 2 citations
Engineering · #Advanced Machining and Optimization Techniques #Advanced Surface Polishing Techniques #Advanced machining processes and optimization

paper · doi:10.1016/j.ijmachtools.2013.07.005

openalex publication_date 2013/07/27 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/29

Citations

• Ductile‐Regime Machining of Germanium and Silicon

Cited by

• Nanometric cutting: Mechanisms, practices and future perspectives
• Diamond cutting of micro-structure array on brittle material assisted by multi-ion implantation