2022/09/05 by Mingjie Li, Wenxin Luo, Xiaojiang Liu +2
Chemical Engineering · Engineering · #Acoustic Wave Resonator Technologies #Analytical Chemistry and Sensors #Gas Sensing Nanomaterials and Sensors
paper · doi:10.1109/led.2022.3204292
openalex publication_date 2022/09/05 · openalex created_date 2025/10/10 · openalex updated_date 2026/07/29
In the past few decades, gas sensitive nanomaterials are usually deposited on specific area of the wafer by drop-casting or inkjet printing for application in gas sensor fabrication. However, wafer-level patterning of sensing materials with satisfactory reproducibility still encounters challenge. In this letter, we propose a facile ‘top-down’ strategy to manufacture wafer-scale gas sensing chips with high-throughput by photolithography using a well-mixed photoresist-nanomaterial suspension, followed by calcination. The fabricated gas sensors based on the proposed approach yield excellent reproducibility and uniformity of sensing response to ethanol detection with a relative standard deviation (RSD) <4.5 %, suggesting promising application for high-volume production of MEMS compatible gas sensors.