Metal-Oxide Sensor Array for Selective Gas Detection in Mixtures

2021/02/25 by Tayebi, Noureddine, Kollia, Varvara, Singh, Pradyumna S.
#Applied Physics (physics.app-ph) #FOS: Computer and information sciences #FOS: Physical sciences #Machine Learning (cs.LG) #Materials Science (cond-mat.mtrl-sci)

paper · doi:10.48550/arxiv.2102.12990

Abstract

We present a monolithic, microfabricated, metal-oxide semiconductor (MOS) sensor array in conjunction with a machine learning algorithm to determine unique fingerprints of individual gases within homogenous mixtures. The array comprises four different metal oxides, and is engineered for independent temperature control and readout from each individual pixel in a multiplexed fashion. The sensor pixels are designed on a very thin membrane to minimize heat dissipation, thereby significantly lowering the overall power consumption (

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