Micro-optical modules fabricated by high-precision replication processes

2024/08/23 by Rudmann, Hartmut, Rossi, Markus
#660 #Konferenzschrift

paper · doi:10.34657/13896

Abstract

Double-sided optical modules are fabricated by precision replication in glass-like, UV curable polymers. Α wafer scale production process has been developed, which allows the fabrication of hundreds of thousands of optical components that pass strict environmental testing. Due to their competitive prices they are of great interest for datacom applications.

Related

• Replication of micro- and diffractive optical elements
• Next generation Co-Packaged Optics Technology to Train & Run Generative AI Models in Data Centers and Other Computing Applications
• Fabrication of Aspherical Microlenses in Fused Silica and Silicon
• Channel resolution enhancement through scalability of nano/micro-scale thickness and width of SU-8 polymer based optical channels using UV lithography
• Scalable High-Precision Microfabrication on Various Lithography-Incompatible Substrates and Materials Enabled by Wafer-Scale Transfer Lithography of Commercial Photoresists