2024/11/26 by Kenichi Umeda, Umeda, Kenichi, Noriyuki Kodera +1
Engineering · Physics and Astronomy · #Advanced machining processes and optimization #Applied Physics (physics.app-ph) #FOS: Physical sciences #Force Microscopy Techniques and Applications #Integrated Circuits and Semiconductor Failure Analysis
paper · pdf · doi:10.48550/arxiv.2411.17085
openalex publication_date 2024/11/26 · openalex created_date 2024/12/05 · openalex updated_date 2026/07/28
Atomic force microscopy (AFM) is a versatile nanoscale imaging technique. Since its spatiotemporal resolution is fundamentally limited by the minimum detectable force (MDF) arising from system noise, a deep understanding of MDF is essential for improving instrumentation. However, the theoretical MDF of amplitude-modulation (AM) AFM has long remained inconsistent, with three reported expressions yielding conflicting coefficients: 1.84, 1.41, and 0.71 times those of other dynamic modes. Moreover, although we recently clarified the strong dependence of force sensitivity on the cantilever's driving frequency, previous theories overlooked this effect. Here, we present an exact solution for the MDF of AM-AFM that accounts for noise frequency dependence, excitation efficiency, and arbitrary cantilever Q-factors. Our results clarify that the coefficient strongly depends on the driving frequency and Q-factor. Notably, when driven at the resonance slope, it stays within 1 and 1.41, thus resolving this long-standing inconsistency. Our findings provide essential guidance for improving instrumentation to visualize previously inaccessible phenomena.